analyzy出错求助！

   [error] Unable to create child process: mesh3d, error code = 267 (7:56:55 下午  四月 24, 2012)
    [error] Simulation completed with execution error on server: Local Machine. (7:56:55 下午  四月 24, 2012)
出现这两行，请教高手怎么解决?
HFSS 13

execution error    你激勵源設錯瞜